Rochester Institute of Technology

Microelectronics Manufacturing Engineering (ME)

Address:

One Lomb Memorial Drive

Rochester, NY 14623

United States

Phone:

1-866-260-3950

Fax:

585-475-7164

Program Information

Degrees Offered:

Master of Engineering in Microelectronics Manufacturing Engineering

Format: Campus

Program Description:

The ME in microelectronics manufacturing engineering provides a broad-based education for students who are interested in a career in the semiconductor industry and hold a bachelor’s degree in traditional engineering or other science disciplines.

Program outcomes

After completing the program, students will be able to:

  • Design and understand a sequence of processing steps to fabricate a solid state device to meet a set of geometric, electrical, and/or processing parameters.
  • Analyze experimental electrical data from a solid state device to extract performance parameters for comparison to modeling parameters used in the device design.
  • Understand current lithographic materials, processes, and systems to meet imaging and/or device patterning requirements.
  • Understand the relevance of a process or device, either proposed or existing, to current manufacturing practices.
  • Perform in a microelectronic engineering environment, as evidenced by an internship.
  • Appreciate the areas of specialty in the field of microelectronics, such as device engineering, circuit design, lithography, materials and processes, and yield and manufacturing.

Plan of study

Students are awarded the ME degree after the successful completion of 30 credit hours, which are comprised of core courses, elective courses, research seminars, and an internship. Under certain circumstances, a student may be required to complete bridge courses totaling more than the minimum number of credits. Students complete courses in microelectronics, microlithography, and manufacturing.

Microelectronics

The microelectronics courses cover major aspects of integrated circuit manufacturing technology, such as oxidation, diffusion, ion implantation, chemical vapor deposition, metalization, plasma etching, etc. These courses emphasize modeling and simulation techniques as well as hands-on laboratory verification of these processes. Students use special software tools for these processes. In the laboratory, students design and fabricate silicon MOS integrated circuits, learn how to utilize semiconductor processing equipment, develop and create a process, and manufacture and test their own integrated circuits.

Microlithography

The microlithography courses are advanced courses in the chemistry, physics, and processing involved in microlithography. Optical lithography is studied through diffraction, Fourier, and image-assessment techniques. Scalar diffraction models are utilized to simulate aerial image formation and influences of imaging parameters. Positive and negative resist systems as well as processes for IC application are studied. Advanced topics include chemically amplified resists; multiple-layer resist systems; phase-shift masks; and electron beam, X-ray, and deep UV lithography. Laboratory exercises include projection-system design, resist-materials characterization, process optimization, and electron-beam lithography.

Manufacturing

The manufacturing courses include topics such as scheduling, work-in-progress tracking, costing, inventory control, capital budgeting, productivity measures, and personnel management. Concepts of quality and statistical process control are introduced. The laboratory for this course is a student-run factory functioning within the department. Important issues such as measurement of yield, defect density, wafer mapping, control charts, and other manufacturing measurement tools are examined in lectures and through laboratory work. Computer-integrated manufacturing also is studied in detail. Process modeling, simulation, direct control, computer networking, database systems, linking application programs, facility monitoring, expert systems applications for diagnosis and training, and robotics are supported by laboratory experiences in the integrated circuit factory. The program is also offered online for engineers employed in the semiconductor industry.

Accreditation:

Middle States Association of Colleges and Schools, Middle States Commission on Higher Education

Facts & Figures

International Financial Aid: Yes

International Financial Aid Description: For graduate study, many of the 70 graduate programs offer assistantships. Additionally, more than 9,000 student jobs are available on campus each year.

Classification: Master's College or University I

Loans Offered: Loans may be available. Applicants may apply by completing the Free Application for Federal Student Aid (FAFSA). Candidates may work with RIT's Financial Aid Office to determine aid eligibility and funding options.

Locale: Large Suburb

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