MSc MicroElectroMechanical Systems (MEMS)
As a result, many new device concepts, fabrication methods and characterisation techniques have emerged. MicroElectroMechanical Systems (MEMS) exploits techniques developed by the microelectronics industry to produce micron-scale mechanical devices such as accelerometers and micro-pumps on silicon wafers.
Semester 1: Integrated circuit design; Introduction to bionanotechnology; Introduction to MEMS; Lab on chip; Microfabrication; Nanoelectronic devices; Optical fibre communications; Research methods
Semester 2: Bionanotechnology lab project; Biosensors; Independent research review; Instrumentation and sensors; Logic and quantum devices; MEMS lab project; MEMS sensors and actuators; Memory and spintronic devices; Music and audio technology; Nanoelectronics lab project; Nanofabrication and characterisation; Photonic devices
Semester 3: Three-month, independent, individual research project, culminating in a dissertation
University of Southampton
International Student Requirements:
All students must meet the University's English language requirements. Students from the US who have been taught and assessed in English can be made exempt.