University of Southampton

Graduate Studies

MSc MicroElectroMechanical Systems (MEMS)


Southampton Management School

University of Southampton

Southampton, England

United Kingdom

Program Information

Degrees Offered:

MSc MicroElectroMechanical Systems (MEMS)

Format: Campus

Program Description:

As a result, many new device concepts, fabrication methods and characterisation techniques have emerged. MicroElectroMechanical Systems (MEMS) exploits techniques developed by the microelectronics industry to produce micron-scale mechanical devices such as accelerometers and micro-pumps on silicon wafers. Semester 1: Integrated circuit design; Introduction to bionanotechnology; Introduction to MEMS; Lab on chip; Microfabrication; Nanoelectronic devices; Optical fibre communications; Research methods Semester 2: Bionanotechnology lab project; Biosensors; Independent research review; Instrumentation and sensors; Logic and quantum devices; MEMS lab project; MEMS sensors and actuators; Memory and spintronic devices; Music and audio technology; Nanoelectronics lab project; Nanofabrication and characterisation; Photonic devices Semester 3: Three-month, independent, individual research project, culminating in a dissertation


University of Southampton

International Student Requirements:

All students must meet the University's English language requirements. Students from the US who have been taught and assessed in English can be made exempt.

Facts & Figures

Financial Aid: No

International Financial Aid: No

Find Schools